MEMS solutions

Our customized MEMS solutions have found their way in many product in different markets, like Instrumentation, Life Science and (Aero)space.

Below you find an overview of some of the projects we have worked on to give you an impression of our capabilities.

MBARI “SURpH” pH sensor (Semiconductor UnderwateR pH), built around Lionix ISFET chip.

MBARI – ISFET for deep sea pH sensor

With our bare ISFET dies as a foundation, the possibilities for sensor development are vast.
Example of Gas Flow Sensor

Bronkhorst – Gas flow sensor

We developed an anemometric gas flow sensor for applications in microfluidics, microchemistry, and more.
A photo showing a microfluidic chip used for extraterrestrial life detection, developed by LioniX.

ESA – Life Marker Chip

A microfluidic chip comprising various reaction chambers, fluid channels, in- and outlets, conductivity and optical sensors, and a configurable rotary valve.
dna sequencing lab on a chip chip showing individual sites for synethesis

Microsens – pH sensors with ISFET chips

With our bare ISFET dies as a foundation, the possibilities for sensor development are vast.

Onset – Conductivity sensor

We developed a non-contact, chemically inert, robust conductivity sensor with a range of almost 3 decades.
cantilevers for MEMS