SmartTip – CIPT probes

cantilevers for MEMS

Application

Current In Plane Tunneling (CIPT) is a very fast and cost effective method to characterize Magnetic Tunnel Junctions (MTJ’s).

Request

Our customer needs a probehead with multiple conducting probepins with submicron spaces between the probes and isolated from each other.

Solution

We developed and are producing a solution based on Thermal Oxidation, Stepper Lithography, RIE Etching, Au evaporation and advanced KOH Etching.