Cantilevers for MEMS

LioniX manufactures silicon and silicon nitride cantilevers with customizable shape and thickness, and reflective or conductive coatings if needed.

Our silicon nitride cantilevers are made of finest quality LPCVD low stress silicon rich nitride (SiRN), while our silicon cantilevers are made of SOI wafers.

We use DRIE as well as wet etching techniques to produce our cantilevers in a cost effective and manufacturable way.

Our customers use cantilevers for measuring physical parameters or in BioMEMS by coating them with selective markers and deploying them as (fiber)optic sensors. They also find wide use as probe tips for scanning surfaces in a plurality of modes.

We would be delighted to explore with you the possibilities to realize your special requests such as cantilevers with pyramids, cantilevers with heaters, resonant cantilevers, cantilevers with integrated optical waveguides, cantilevers with submicron spacings etc.